Kakaretso ea Photoresist
Photoresist, e tsejoang hape e le photoresist, e bolela thepa e tšesaane ea filimi eo ho qhibiliha ha eona ho fetohang ha e pepesetsoa khanya ea UV, mahlaseli a elektrone, mahlaseli a ione, mahlaseli a X, kapa mahlaseli a mang.
E entsoe ka resin, photoinitiator, solvent, monomer, le lintho tse ling tse eketsang (sheba Tafole ea 1). Resin ea photoresist le photoinitiator ke likarolo tsa bohlokoa ka ho fetisisa tse amang ts'ebetso ea photoresist. E sebelisoa e le sekoahelo se thibelang ho bola nakong ea ts'ebetso ea photolithography.
Ha ho sebetsoa bokaholimo ba semiconductor, ho sebelisa photoresist e khethiloeng hantle ho ka hlahisa setšoantšo se lakatsehang holim'a bokaholimo.
Tafole ea 1.
| Lisebelisoa tsa Photoresist | Tshebetso |
| Solvent | E etsa hore photoresist e be mokelikeli le ho feto-fetoha ha mocheso, 'me ha e na phello e kaalo holim'a litšobotsi tsa lik'hemik'hale tsa photoresist. |
| Moqapi oa lifoto | E boetse e tsejoa e le photosensitizer kapa agent ea photocuring, ke karolo e utloang khanya linthong tse hanyetsang khanya. Ke mofuta oa motsoako o ka bolang ho ba li-free radical kapa li-cation 'me oa qala liketso tsa lik'hemik'hale tse hokahanyang ka har'a li-monomers ka mor'a ho monya ultraviolet kapa matla a khanya a bonahalang a bolelele bo itseng ba leqhubu. |
| Resin | Ke li-polymer tse sa sebetseng, 'me li sebetsa e le li-binder ho tšoara thepa e fapaneng ka har'a photoresist hammoho, e leng se fang photoresist thepa ea eona ea mechine le ea lik'hemik'hale. |
| Monomer | E boetse e tsejoa e le diluent tse sebetsang, ke limolek'hule tse nyane tse nang le lihlopha tse sebetsang tse ka polimang 'me ke metsoako e tlase ea boima ba limolek'hule e ka nkang karolo liketsong tsa polymerization ho theha li-resin tse phahameng tsa boima ba limolek'hule. |
| Tlatsetso | E sebelisoa ho laola thepa e itseng ea lik'hemik'hale ea li-photoresist. |
Li-photoresist li arotsoe ka lihlopha tse peli tse kholo ho latela setšoantšo seo li se etsang: tse ntle le tse mpe. Nakong ea ts'ebetso ea ho hanyetsa khanya, kamora ho pepesehela le nts'etsopele, likarolo tse pepesehileng tsa sekoahelo lia qhibiliha, ho siea likarolo tse sa pepesehang. Sebopeho sena se nkoa e le se hanyetsa khanya hantle. Haeba likarolo tse pepesehileng li ntse li le teng ha likarolo tse sa pepesehang li qhibiliha, sekoahelo se nkoa e le se hanyetsa khanya hampe. Ho latela mohloli oa leseli le pepesehang le mohloli oa mahlaseli, li-photoresist li boetse li aroloa ka UV (ho kenyeletsoa le li-photoresists tse ntle le tse mpe tsa UV), li-photoresists tse tebileng tsa UV (DUV), li-photoresists tsa X-ray, li-photoresists tsa mahlaseli a elektrone, le li-photoresists tsa mahlaseli a ion.
Photoresist e sebediswa haholoholo tshebetsong ya dipaterone tse nang le dibopeho tse ntle diphanele tsa pontsho, dipotoloho tse kopaneng, le disebediswa tse arohaneng tsa semiconductor. Theknoloji ya tlhahiso e ka morao ho photoresist e rarahane, ka mefuta e mengata ya dihlahiswa le ditlhaloso. Tlhahiso ya dipotoloho tse kopaneng tsa indasteri ya dieleketeroniki e beha ditlhoko tse thata ho photoresist e sebediswang.
Ever Ray, moetsi ea nang le boiphihlelo ba lilemo tse 20 ea ikhethang tlhahisong le nts'etsopele ea li-resin tse fofonehang, o ithorisa ka bokhoni ba tlhahiso ea selemo le selemo ba lithane tse 20,000, mohala o felletseng oa sehlahisoa, le bokhoni ba ho iketsetsa lihlahisoa. Ho photoresist, Ever Ray e na le resin ea 17501 e le karolo ea mantlha.
